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Foundations of MEMS / Chang Liu.
Publication details: Upper Saddle River, N.J. : Prentice Hall, 2012.Edition: 2nd edDescription: xiv, 562 p. : ill. ; 24 cmISBN:- 9780132497367 (alk. paper)
- 0132497360 (alk. paper)
| Item type | Current library | Home library | Collection | Call number | Materials specified | Copy number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|---|---|---|
| AM | PERPUSTAKAAN LINGKUNGAN KEDUA | PERPUSTAKAAN LINGKUNGAN KEDUA KOLEKSI AM-P. LINGKUNGAN KEDUA | - | TK7875.L583 2012 3 (Browse shelf(Opens below)) | 1 | Available | 00002055028 |
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| TK7875.G385 Smart MEMS and sensor systems / | TK7875.I38 2007 3 IET Seminar on Micro Electro-Mechanical Systems (MEMS) Technology : IET Seminar Digests, April 25, 2007, London, UK / | TK7875.I538 2007 3 MEMS technology and devices : Suntec, Singapore, 1-6 July 2007 / | TK7875.L583 2012 3 Foundations of MEMS / | TK7875.L583 3 Foundations of MEMS / | TK7875.L633 3 Dynamics of microelectromechanical systems / | TK7875.L634 3 Mechanical design of microresonators : modeling and applications / |
Includes bibliographical references and index.
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