Foundations of MEMS /
Liu, Chang, Ph.D.
Foundations of MEMS / Chang Liu. - 2nd ed. - Upper Saddle River, N.J. : Prentice Hall, 2012. - xiv, 562 p. : ill. ; 24 cm.
Includes bibliographical references and index.
9780132497367 (alk. paper) RM567.50 0132497360 (alk. paper)
Microelectromechanical systems.
Foundations of MEMS / Chang Liu. - 2nd ed. - Upper Saddle River, N.J. : Prentice Hall, 2012. - xiv, 562 p. : ill. ; 24 cm.
Includes bibliographical references and index.
9780132497367 (alk. paper) RM567.50 0132497360 (alk. paper)
Microelectromechanical systems.