MARC details
| 000 -LEADER |
|---|
| fixed length control field |
01389cam a22002898a 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20250918130123.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
110321s2010 njua bi 001 0 eng |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9781848212022 |
| Terms of availability |
RM443.55 |
| 039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE] |
|---|
| Level of rules in bibliographic description |
201106141709 |
| Level of effort used to assign nonsubject heading access points |
ariff |
| Level of effort used to assign subject headings |
201106061544 |
| Level of effort used to assign classification |
rasyilla |
| y |
03-21-2011 |
| z |
rasyilla |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
UKM |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) |
|---|
| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) |
TK7872.M3 L336 3 |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) |
|---|
| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) |
TK7872.M3 |
| Local cutter number (OCLC) ; Book number/undivided call number, CALL (RLIN) |
L336 |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Landis, Stefan. |
| 245 10 - TITLE STATEMENT |
|---|
| Title |
Lithography / |
| Statement of responsibility, etc. |
Stefan Landis. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Hoboken, NJ : |
| Name of publisher, distributor, etc. |
Wiley-ISTE, |
| Date of publication, distribution, etc. |
2010. |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xv, 377 p. : |
| Other physical details |
ill. ; 24 cm. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
Includes bibliographical references and index. |
| 520 ## - SUMMARY, ETC. |
|---|
| Summary, etc. |
'Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components'-- |
| Assigning source |
Provided by publisher. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microlithography. |
| 650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
TECHNOLOGY & ENGINEERING / Material Science |
| Source of heading or term |
bisacsh. |
| 907 ## - LOCAL DATA ELEMENT G, LDG (RLIN) |
|---|
| a |
.b14975427 |
| b |
2021-05-28 |
| c |
2019-11-12 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Koha item type |
AM |
| Suppress in OPAC |
No |
| Call number prefix |
TK7872.M3 L336 3 |
| 914 ## - VTLS Number |
|---|
| VTLS Number |
vtls003459613 |
| 991 ## - LOCAL NOTE (NAMA FAKULTI/INSTITUT/PUSAT) |
|---|
| a |
Fakulti Kejuruteraan dan Alam Bina |
| 998 ## - LOCAL CONTROL INFORMATION (RLIN) |
|---|
| Library |
PERPUSTAKAAN LINGKUNGAN KEDUA |
| Operator's initials, OID (RLIN) |
2011-08-03 |
| Cataloger's initials, CIN (RLIN) |
m |
| Material Type (Sierra) |
Printed Books |
| Language |
English |
| Country |
|
| -- |
0 |
| -- |
.b14975427 |
