Lithography /
Landis, Stefan.
Lithography / Stefan Landis. - Hoboken, NJ : Wiley-ISTE, 2010. - xv, 377 p. : ill. ; 24 cm.
Includes bibliographical references and index.
'Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components'--
9781848212022 RM443.55
Microlithography.
TECHNOLOGY & ENGINEERING / Material Science
Lithography / Stefan Landis. - Hoboken, NJ : Wiley-ISTE, 2010. - xv, 377 p. : ill. ; 24 cm.
Includes bibliographical references and index.
'Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components'--
9781848212022 RM443.55
Microlithography.
TECHNOLOGY & ENGINEERING / Material Science