The science and engineering of microelectronic fabrication / (Record no. 207939)
[ view plain ]
| 000 -LEADER | |
|---|---|
| fixed length control field | 00785nam a2200217 a 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 981208s1996 xxua b 001 eng |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0195105087 |
| Terms of availability | RM181.50 |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | UKM |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) | |
| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) | TK7871.85.C25 |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Campbell, Stephen A., |
| Dates associated with a name | 1954- |
| 245 14 - TITLE STATEMENT | |
| Title | The science and engineering of microelectronic fabrication / |
| Statement of responsibility, etc. | Stephen A. Campbell. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | New York : |
| Name of publisher, distributor, etc. | Oxford University Press , |
| Date of publication, distribution, etc. | 1996. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 536 p. : ill. ; |
| Dimensions | 24 cm. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc. note | includes bibliographical references and index. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Semiconductors |
| General subdivision | Design and construction |
| 907 ## - LOCAL DATA ELEMENT G, LDG (RLIN) | |
| a | .b12064312 |
| b | 2022-08-05 |
| c | 2019-11-12 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | AM |
| Suppress in OPAC | No |
| Call number prefix | TK7871.85.C25 |
| 914 ## - VTLS Number | |
| VTLS Number | vtls000213249 |
| 991 ## - LOCAL NOTE (NAMA FAKULTI/INSTITUT/PUSAT) | |
| a | Fakulti Kejuruteraan |
| 998 ## - LOCAL CONTROL INFORMATION (RLIN) | |
| Library | PERPUSTAKAAN LINGKUNGAN KEDUA |
| Operator's initials, OID (RLIN) | 1999-05-08 |
| Cataloger's initials, CIN (RLIN) | m |
| Material Type (Sierra) | Printed Books |
| Language | English |
| Country | |
| -- | 0 |
| -- | .b12064312 |
| Withdrawn status | Lost status | Damaged status | Not for loan | Collection | Home library | Current library | Shelving location | Date acquired | Source of acquisition | Cost, normal purchase price | Inventory number | Total checkouts | Full call number | Barcode | Date last seen | Copy number | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| PERPUSTAKAAN LINGKUNGAN KEDUA | PERPUSTAKAAN LINGKUNGAN KEDUA | KOLEKSI AM-P. LINGKUNGAN KEDUA | 12/11/2019 | - | 0.00 | .i14964375 | 64 | TK7871.85.C25 | 00000947958 | 13/09/2025 | 1 | 13/09/2025 | AM |