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The science and engineering of microelectronic fabrication /

Campbell, Stephen A., 1954-

The science and engineering of microelectronic fabrication / Stephen A. Campbell. - New York : Oxford University Press , 1996. - 536 p. : ill. ; 24 cm.

includes bibliographical references and index.

ISBN: 0195105087 RM181.50

Subjects--Topical Terms:
Semiconductors--Design and construction

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