000			01182nam a2200313 a 4500
005			20250918164914.0
008			120726s2011 flua b 001 0 eng
020			_a9781420082012 (hbk.) _cRM967.86
039		9	_a201209241143 _bzabidah _c201209131546 _dzaina _c201207261201 _didah _y07-26-2012 _zidah
040			_aDLC _cDLC _dDLC _dUKM
090			_aTA418.7.W47 2011 3
090			_aTA418.7 _b.W47 2011 3
100	1		_aWhitehouse, D. J. _q(David J.)
245	1	0	_aHandbook of surface and nanometrology / _cby David J. Whitehouse.
250			_a2nd ed.
260			_aBoca Raton, Mass. : _bCRC Press, _c2011.
300			_axxiii, 975 p. : _bill. ; _c29 cm.
500			_aRev. ed. of: Handbook of surface metrology. c1994.
504			_aIncludes bibliographical references and index.
650		0	_aSurfaces (Technology) _xMeasurement.
700	1		_aWhitehouse, D. J. _q(David J.). _tHandbook of surface metrology.
907			_a.b15436329 _b2019-11-12 _c2019-11-12
942			_c01 _n0 _kTA418.7.W47 2011 3
914			_avtls003508888
990			_azsz
991			_aFakulti Kejuruteraan dan Alam Bina
998			_al _b2012-01-07 _cm _da _feng _gflu _y0 _z.b15436329
999			_c526991 _d526991