| 000 | 01374nam a2200361 a 4500 | ||
|---|---|---|---|
| 005 | 20250930132803.0 | ||
| 008 | 111215r2010 my dao m 000 0 may | ||
| 039 | 9 |
_a201201121449 _blan _c201201061540 _dhendon _y12-15-2011 _zzarina |
|
| 040 | _aUKM | ||
| 090 | _aTP248.25.B54M85 2010 tesis 3 | ||
| 090 |
_aTP248.25 .B54 _bM85 2010 3 |
||
| 100 | 0 | _aMuhammad Ramdzan Buyong. | |
| 245 | 1 | 0 |
_aFabrikasi sensor tekanan kapasitif sangat rendah (STKSR) menggunakan teknologi proses piawai CMOS / _cMuhammad Ramdzan bin Buyong. |
| 260 | _c2010. | ||
| 300 |
_axxvi, 201 p. : _bill. charts, photographs, ; _c30 cm. |
||
| 502 | _aTesis (M.Sc.) - Universiti Kebangsaan Malaysia, 2010. | ||
| 504 | _aRujukan : p. 194-198. | ||
| 610 | 2 | 0 |
_aUniversiti Kebangsaan Malaysia _xDissertations. _962865 |
| 650 | 0 |
_aDissertations, Academic _zMalaysia. _962866 |
|
| 650 | 0 | _aBioMEMS. | |
| 650 | 0 | _aMetal oxide semiconductors. | |
| 650 | 0 | _aDetectors. | |
| 650 | 0 |
_aMicroelectronics. _960418 |
|
| 650 | 0 | _aMicroelectromechanical systems. | |
| 650 | 0 | _aElectromechanical devices. | |
| 907 |
_a.b15212105 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c3 _n0 _kTP248.25.B54M85 2010 tesis 3 |
||
| 914 | _avtls003484609 | ||
| 990 | _aszj/ha | ||
| 991 | _aInstitut Kejuruteraan Mikro dan Nanoelektronik (IMEN) | ||
| 998 |
_al0013 _b2011-02-12 _cm _dx _fmay _gmy _y0 _z.b15212105 |
||
| 999 |
_c505367 _d505367 |
||