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040 _aUKM
090 _aTP248.25.B54M85 2010 tesis 3
090 _aTP248.25 .B54
_bM85 2010 3
100 0 _aMuhammad Ramdzan Buyong.
245 1 0 _aFabrikasi sensor tekanan kapasitif sangat rendah (STKSR) menggunakan teknologi proses piawai CMOS /
_cMuhammad Ramdzan bin Buyong.
260 _c2010.
300 _axxvi, 201 p. :
_bill. charts, photographs, ;
_c30 cm.
502 _aTesis (M.Sc.) - Universiti Kebangsaan Malaysia, 2010.
504 _aRujukan : p. 194-198.
610 2 0 _aUniversiti Kebangsaan Malaysia
_xDissertations.
_962865
650 0 _aDissertations, Academic
_zMalaysia.
_962866
650 0 _aBioMEMS.
650 0 _aMetal oxide semiconductors.
650 0 _aDetectors.
650 0 _aMicroelectronics.
_960418
650 0 _aMicroelectromechanical systems.
650 0 _aElectromechanical devices.
907 _a.b15212105
_b2021-05-28
_c2019-11-12
942 _c3
_n0
_kTP248.25.B54M85 2010 tesis 3
914 _avtls003484609
990 _aszj/ha
991 _aInstitut Kejuruteraan Mikro dan Nanoelektronik (IMEN)
998 _al0013
_b2011-02-12
_cm
_dx
_fmay
_gmy
_y0
_z.b15212105
999 _c505367
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