| 000 | 01435nam a22003374a 4500 | ||
|---|---|---|---|
| 005 | 20250918145639.0 | ||
| 008 | 111123s2011 enka b 001 0 eng | ||
| 020 |
_a9781848212114 (hbk.) _cRM375.28 |
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| 020 | _a1848212119 | ||
| 039 | 9 |
_a201112131552 _brosli _c201111231502 _dfarid _c201111231437 _dfarid _y11-23-2011 _zfarid |
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| 040 | _aUKM | ||
| 041 | 1 |
_aeng _hfre |
|
| 090 | _aTK7872.M3N34413 3 | ||
| 090 |
_aTK7872.M3 _bN34413 |
||
| 130 | 0 |
_aNanolithography _lEnglish |
|
| 245 | 1 | 0 |
_aNano-lithography / _cedited by Stefan Landis. |
| 260 |
_aHoboken, NJ : _bWiley, _c2011. |
||
| 300 |
_axxv, 325 p. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 505 | 0 | _aCh. 1. X-ray lithography : fundamentals and applications -- ch. 2. NanoImprint lithography -- ch. 3. Lithography techniques using scanning probe microscopy -- ch. 4. Lithography and manipulation based on the optical properties of metal nanostructures -- ch. 5. Patterning with self-assembling block copolymers -- ch. 6. Metrology for lithography. | |
| 650 | 0 | _aMicrolithography. | |
| 650 | 0 | _aNanotechnology. | |
| 700 | 1 | _aLandis, Stefan. | |
| 907 |
_a.b15201569 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7872.M3N34413 3 |
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| 914 | _avtls003483488 | ||
| 990 | _ark4 | ||
| 991 | _aPrInstitut Kejuruteraan Mikro & Nanoelektronik (IMEN) | ||
| 998 |
_al _b2011-10-11 _cm _da _feng _genk _y0 _z.b15201569 |
||
| 999 |
_c504359 _d504359 |
||