| 000 | 01389cam a22002898a 4500 | ||
|---|---|---|---|
| 005 | 20250918130123.0 | ||
| 008 | 110321s2010 njua bi 001 0 eng | ||
| 020 |
_a9781848212022 _cRM443.55 |
||
| 039 | 9 |
_a201106141709 _bariff _c201106061544 _drasyilla _y03-21-2011 _zrasyilla |
|
| 040 | _aUKM | ||
| 090 | _aTK7872.M3 L336 3 | ||
| 090 |
_aTK7872.M3 _bL336 |
||
| 100 | 1 | _aLandis, Stefan. | |
| 245 | 1 | 0 |
_aLithography / _cStefan Landis. |
| 260 |
_aHoboken, NJ : _bWiley-ISTE, _c2010. |
||
| 300 |
_axv, 377 p. : _bill. ; 24 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 520 |
_a'Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components'-- _cProvided by publisher. |
||
| 650 | 0 | _aMicrolithography. | |
| 650 | 7 |
_aTECHNOLOGY & ENGINEERING / Material Science _2bisacsh. |
|
| 907 |
_a.b14975427 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7872.M3 L336 3 |
||
| 914 | _avtls003459613 | ||
| 991 | _aFakulti Kejuruteraan dan Alam Bina | ||
| 998 |
_al _b2011-08-03 _cm _da _feng _gnju _y0 _z.b14975427 |
||
| 999 |
_c482358 _d482358 |
||