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006 m d
007 cr nn 008maaau
008 090212s2006 gw q j eng d
020 _a9783540313724 (electronic bk.)
020 _a9783540313335 (paper)
035 _a(Springer)978-3-540-31333-5
039 9 _a200902121805
_bmuhaimin
_c200902121026
_dmuhaimin
_c200804041057
_dmuhaimin
_c200804040940
_dmuhaimin
_y04-03-2008
_zmuhaimin
050 1 4 _aTA1520
_b.U35 2006
082 0 4 _a621.36
_222
090 _aTA1520
_b.U34 2006
100 1 _aUkita, Hiroo.
245 1 0 _aMicromechanical Photonics
_h[electronic resource] /
_cby Hiroo Ukita.
260 _aBerlin, Heidelberg :
_bSpringer-Verlag Berlin Heidelberg,
_c2006.
300 _axi, 250 p. :
_bill., digital ;
_c25 cm
440 0 _aMicrotechnology and Mems,
_x1615-8326
650 0 _aPhotonics.
650 0 _aMicroelectronics.
_960418
650 0 _aMicroelectromechanical systems.
710 2 _aSpringerLink (Online service)
773 0 _tSpringer e-books
856 4 0 _uhttps://eresourcesptsl.ukm.remotexs.co/user/login?url=http://dx.doi.org/http://dx.doi.org/10.1007/978-3-540-31372-4
907 _a.b14140275
_b2025-04-18
_c2019-11-12
942 _n0
_kTA1520 .U34 2006
914 _avtls003371578
998 _ae
_b2008-03-04
_cm
_dz
_feng
_ggw
_y0
_z.b14140275
999 _c410007
_d410007