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| 007 | cr nn 008maaau | ||
| 008 | 090212s2006 gw q j eng d | ||
| 020 | _a9783540313724 (electronic bk.) | ||
| 020 | _a9783540313335 (paper) | ||
| 035 | _a(Springer)978-3-540-31333-5 | ||
| 039 | 9 |
_a200902121805 _bmuhaimin _c200902121026 _dmuhaimin _c200804041057 _dmuhaimin _c200804040940 _dmuhaimin _y04-03-2008 _zmuhaimin |
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_a621.36 _222 |
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| 100 | 1 | _aUkita, Hiroo. | |
| 245 | 1 | 0 |
_aMicromechanical Photonics _h[electronic resource] / _cby Hiroo Ukita. |
| 260 |
_aBerlin, Heidelberg : _bSpringer-Verlag Berlin Heidelberg, _c2006. |
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| 300 |
_axi, 250 p. : _bill., digital ; _c25 cm |
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| 440 | 0 |
_aMicrotechnology and Mems, _x1615-8326 |
|
| 650 | 0 | _aPhotonics. | |
| 650 | 0 |
_aMicroelectronics. _960418 |
|
| 650 | 0 | _aMicroelectromechanical systems. | |
| 710 | 2 | _aSpringerLink (Online service) | |
| 773 | 0 | _tSpringer e-books | |
| 856 | 4 | 0 | _uhttps://eresourcesptsl.ukm.remotexs.co/user/login?url=http://dx.doi.org/http://dx.doi.org/10.1007/978-3-540-31372-4 |
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