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_aLow-G area-changed MEMs accelerometer with bulk silicon technique : _bdesign, simulation and testing / _cBadariah binti Bais |
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_aBangi : _bInstitut Kejuruteraan Mikro dan Nanoelektronik, Universiti Kebangsaan Malaysia, _c2007 |
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_axxxiii , 306 p. : _bill. ; _c30 cm. |
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| 502 | _aThesis (Ph.D.) - Universiti Kebangsaan Malaysia, 2007 | ||
| 504 | _aReferences : p. [231]-240 | ||
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_aUniversiti Kebangsaan Malaysia _xDissertations _962865 |
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_aDissertations, Academic _zMalaysia _962866 |
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| 650 | 0 | _aMicroelectromechanical systems | |
| 650 | 0 | _aAccelerometers | |
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| 991 | _aInstitut Kejuruteraan Mikro dan Nanoelektronik | ||
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