000 01324nam a2200325 a 4500
005 20250930123455.0
008 080125s2007 my ao m 000 0 eng
020 _cHadiah
039 9 _a201212142111
_byah
_c200807041055
_dhayat
_c200804101623
_dlaili
_c200801281535
_dnorehan
_y01-25-2008
_znorehan
040 _aUKM
090 _aTK7875.B33 2007 3tesis
090 _aTK7875
_b.B33 2007 3
100 0 _aBadariah Bais
_951790
245 1 0 _aLow-G area-changed MEMs accelerometer with bulk silicon technique :
_bdesign, simulation and testing /
_cBadariah binti Bais
260 _aBangi :
_bInstitut Kejuruteraan Mikro dan Nanoelektronik, Universiti Kebangsaan Malaysia,
_c2007
300 _axxxiii , 306 p. :
_bill. ;
_c30 cm.
502 _aThesis (Ph.D.) - Universiti Kebangsaan Malaysia, 2007
504 _aReferences : p. [231]-240
610 2 0 _aUniversiti Kebangsaan Malaysia
_xDissertations
_962865
650 0 _aDissertations, Academic
_zMalaysia
_962866
650 0 _aMicroelectromechanical systems
650 0 _aAccelerometers
907 _a.b14053950
_b2025-07-18
_c2019-11-12
942 _c3
_n0
_kTK7875.B33 2007 3tesis
914 _avtls003362579
990 _aNY/nms
991 _aInstitut Kejuruteraan Mikro dan Nanoelektronik
998 _al
_b2008-12-01
_cm
_dx
_feng
_gmy
_y0
_z.b14053950
999 _c401536
_d401536