| 000 | 01659nam a2200433 a 4500 | ||
|---|---|---|---|
| 005 | 20250930122726.0 | ||
| 008 | 070503s2006 flua b 001 0 eng | ||
| 020 |
_a0849391377 (v. 1) _cRM366.05 |
||
| 020 |
_a0849391385 (v. 2) _cRM366.05 |
||
| 020 |
_a0849391393 (v. 3) _cRM366.05 |
||
| 039 | 9 |
_a201210241825 _bzaina _c201210221847 _dzabidah _c200803130846 _dlan _c200707240929 _dbedah _y05-03-2007 _zrahah |
|
| 040 | _aUKM | ||
| 090 | _aTJ151.M45 2006 3 | ||
| 090 |
_aTJ151 _b.M45 2006 |
||
| 090 |
_aTJ151 _b.M45 2006 3 |
||
| 245 | 0 | 4 |
_aThe MEMS handbook / _cedited by Mohamed Gad-el-Hak. |
| 250 | _a2nd ed. | ||
| 260 |
_aBoca Raton : _bCRC/Taylor & Francis, _c2006. |
||
| 300 |
_a3 v. : _bill. ; _c26 cm. |
||
| 490 | 1 | _aMechanical engineering series. | |
| 504 | _aIncludes bibliographical references and index. | ||
| 505 | 0 |
_gvolume 1. _tIntroduction and fundamentals - _gvolume 2. _tDesign and fabrication - _gvolume 3. _tApplications. |
|
| 650 | 0 |
_aMechanical engineering _vHandbooks, manuals, etc. |
|
| 650 | 0 | _aMicroelectromechanical systems. | |
| 650 | 0 |
_aMicroelectronics. _960418 |
|
| 650 | 0 | _aNanotechnology. | |
| 700 | 1 |
_aGad-el-Hak, Mohamed, _d1945- |
|
| 740 | 0 | 2 |
_aIntroduction and fundamentals ; _nvolume 1. |
| 740 | 0 | 2 |
_aDesign and fabrication ; _nvolume 2. |
| 740 | 0 | 2 |
_aApplications ; _nvolume 3. |
| 907 |
_a.b13911430 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTJ151.M45 2006 3 |
||
| 914 | _avtls003347093 | ||
| 990 | _aza | ||
| 991 | _aFakulti Sains dan Teknologi | ||
| 991 | _aJabatan Kejuruteraan Elektrik, Elektronik dan Sistem | ||
| 998 |
_a(3)l _a(3)t _b2007-03-05 _cm _da _feng _gflu _y0 _z.b13911430 |
||
| 999 |
_c388084 _d388084 |
||