| 000 | 01184nam a2200313 a 4500 | ||
|---|---|---|---|
| 005 | 20250930122709.0 | ||
| 008 | 070418s2006 flua b 001 0 eng | ||
| 020 |
_a0824724313 (hbk.) _cRM576.30 |
||
| 039 | 9 |
_a200803130942 _blan _c200712271546 _didah _c200707161213 _dbedah _c200707031253 _dmazarita _y04-18-2007 _zrahah |
|
| 040 | _aUKM | ||
| 090 | _aTK7836.M524 3 | ||
| 090 |
_aTK7836 _b.M524 |
||
| 245 | 0 | 0 |
_aMicrofabrication and nanomanufacturing / _cedited by Mark J. Jackson |
| 260 |
_aBoca Raton, FL : _bCRC/Taylor & Francis, _c2006 |
||
| 300 |
_a401 p. : _bill. ; _c27 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aMicroelectronics _960418 |
|
| 650 | 0 |
_aIntegrated circuits _xDesign and construction |
|
| 650 | 0 |
_aMicroelectromechanical systems _xDesign and construction |
|
| 700 | 1 | _aJackson, Mark J. | |
| 907 |
_a.b13906094 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7836.M524 3 |
||
| 914 | _avtls003346530 | ||
| 990 | _aza | ||
| 991 | _aJabatan Kejuruteraan Elektrik, Elektronik & Sistem | ||
| 991 | _aInstitut Kejuruteraan Mikro & Nanoelektronik | ||
| 998 |
_al _b2007-05-04 _cm _da _feng _gflu _y0 _z.b13906094 |
||
| 999 |
_c387564 _d387564 |
||