000			01534cam a22003494a 4500
005			20250930122150.0
008			060915s2005 nyua bi 001 0 eng
020			_a0071455566 _cRM580.80
039		9	_a200702231207 _bariff _c200702071008 _didah _c200612261506 _drahah _c200609151646 _y09-15-2006 _zrahah
090			_aTK7870.15.G558 3
090			_aTK7870.15 _b.G558
100	1		_aGilleo, Ken
245	1	0	_aMEMS/MOEMS packaging : _bconcepts, designs, materials, and processes / _cKen Gilleo
260			_aNew York : _bMcGraw-Hill, _c2005
300			_axiii, 220 p. : _bill. ; _c24 cm.
440		0	_aMcGraw-Hill nanoscience and technology series
504			_aIncludes bibliographical references (p. 203-213) and index
650		0	_aMicroelectronic packaging _960415
650		0	_aMicroelectromechanical systems
650		0	_aOptoelectronic devices
856	4	1	_3Table of contents only _uhttp://www.loc.gov/catdir/toc/fy0606/2005049594.html
856	4	2	_3Contributor biographical information _uhttp://www.loc.gov/catdir/enhancements/fy0634/2005049594-b.html
856	4	2	_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy0634/2005049594-d.html
856	4	1	_3Table of contents only _uhttp://www.loc.gov/catdir/enhancements/fy0634/2005049594-t.html
907			_a.b13802902 _b2021-05-28 _c2019-11-12
942			_c01 _n0 _kTK7870.15.G558 3
914			_avtls003335121
990			_amaa
991			_aJabatan Kejuruteraan Elektronik
998			_al _b2006-02-09 _cm _da _feng _gnyu _y0 _z.b13802902
999			_c378257 _d378257