| 000 | 00785nam a2200217 a 4500 | ||
|---|---|---|---|
| 008 | 981208s1996 xxua b 001 eng | ||
| 020 |
_a0195105087 _cRM181.50 |
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| 040 | _aUKM | ||
| 090 | _aTK7871.85.C25 | ||
| 100 | 1 |
_aCampbell, Stephen A., _d1954- |
|
| 245 | 1 | 4 |
_aThe science and engineering of microelectronic fabrication / _cStephen A. Campbell. |
| 260 |
_aNew York : _bOxford University Press , _c1996. |
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| 300 |
_a536 p. : ill. ; _c24 cm. |
||
| 504 | _aincludes bibliographical references and index. | ||
| 650 |
_aSemiconductors _xDesign and construction |
||
| 907 |
_a.b12064312 _b2022-08-05 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7871.85.C25 |
||
| 914 | _avtls000213249 | ||
| 991 | _aFakulti Kejuruteraan | ||
| 998 |
_al _b1999-05-08 _cm _da _feng _gxxu _y0 _z.b12064312 |
||
| 999 |
_c207939 _d207939 |
||