Semiconductor lithography: principles, practices, and materials / Wayne M. Moreau.

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Publication details: New York: Plenum Press, 1988.Description: 931 p. : ill. ; 26 cmISBN:

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Holdings
Item type	Current library	Home library	Collection	Call number	Materials specified	Copy number	Status	Date due	Barcode
AM	PERPUSTAKAAN LINGKUNGAN KEDUA	PERPUSTAKAAN LINGKUNGAN KEDUA KOLEKSI AM-P. LINGKUNGAN KEDUA	-	TK7871.85.M583 (Browse shelf(Opens below))		1	Available		00000314759

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