Microlithography [electronic resource] : science and technology / editors, Kazuaki Suzuki and Bruce W. Smith

Contributor(s):

Suzuki, Kazuaki
Smith, Bruce W, 1959-

Series: Optical science and engineering seriesPublication details: Boca Raton : Taylor & Francis, c2007Edition: 2nd edISBN:

9780824790240 (alk. paper)
0824790243 (alk. paper)

Subject(s):

Microlithography -- Industrial applications
Integrated circuits -- Masks
Metal oxide semiconductors, complementary -- Design and construction
Manufacturing processes

DDC classification:

621.3815/31 22

Online resources:

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CRCnetBASE Click here for the electronic version

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Microlithography [electronic resource] : science and technology / editors, Kazuaki Suzuki and Bruce W. Smith

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