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1.
Mechanical microsensors / M. Elwenspoek, R.J. Wiergerink by Series: Microtechnology and MEMS
Publication details: Berlin : Springer, 2001
Availability: Items available for loan: PERPUSTAKAAN TUN SERI LANANG (1)Call number: TK7875.E388 3.

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2.
Micromachines as tools for nanotechnology / H. Fujita (ed.) by Series: Microtechnology and MEMS
Publication details: Berlin : Springer, 2003
Availability: Items available for loan: PERPUSTAKAAN DR ABDUL LATIFF (1)Call number: T174.7.M527 2003. PERPUSTAKAAN LINGKUNGAN KEDUA (1)Call number: T174.7.M527 3.

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3.
Force sensors for microelectronic packaging applications / J. Schwizer, M. Mayer, O. Brand. by Series: Microtechnology and mems
Publication details: Berlin : Springer-Verlag, 2004
Online resources:
Availability: Items available for loan: PERPUSTAKAAN LINGKUNGAN KEDUA (1)Call number: TK7874.S34 3.

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Micromechanical Photonics [electronic resource] / by Hiroo Ukita. by Series: Microtechnology and Mems
Publication details: Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2006
In: Springer e-books
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Availability: No items available.

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CMOS Hotplate Chemical Microsensors [electronic resource] / by Markus Graf ... [et al.]. by Series: Microtechnology and MEMS
Publication details: Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2007
In: Springer e-books
Online resources:
Availability: No items available.

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