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	1.	RF MEMS circuit design for wireless communications / Hector J. De Los Santos by De Los Santos, Hector J Series: MEMS--Microelectromechanical systems series Publication details: Boston : Artech House, 2002 Availability: Items available for loan: PERPUSTAKAAN LINGKUNGAN KEDUA (1)Call number: TK5103.2.D44 3. Place hold
	2.	Introduction to microelectromechanical (MEM) microwave systems / Htor J. de los Santos. by Santos, Hector J. de los Series: Artech House microwave library \| Microelectromechanical systems series Publication details: Boston : Artech House, c1999 Other title: Microelectromechanical (MEM) microwave systems Availability: No items available.
	3.	MEMS mechanical sensors / Stephen Beeby ... [et al.] by Beeby, Stephen Series: Microelectromechanical systems series Publication details: Boston : Artech House, 2004 Availability: Items available for loan: PERPUSTAKAAN LINGKUNGAN KEDUA (1)Call number: TK7875.M46. Place hold
	4.	Fundamentals and applications of microfluidics / Nam-Trung Nguyen, Steven T. Wereley. by Nguyen, Nam-Trung, 1970- Wereley, Steven T Series: Microelectromechanical systems series Publication details: Boston, MA : Artech House, 2002 Availability: Items available for loan: PERPUSTAKAAN LINGKUNGAN KEDUA (1)Call number: TJ843.N4787 3. Place hold

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