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	1.	Supercritical fluid cleaning : fundamentals, technology, and applications / edited by John McHardy and Samuel P. Sawan by McHardy, John Sawan, Samuel P Series: Materials science and process technology series Publication details: Westwood, N.J. : Noyes Publications, 1998 Online resources: Publisher description Table of contents Availability: Items available for loan: PERPUSTAKAAN LINGKUNGAN KEDUA (1)Call number: TP156.E8S86 pasca. Place hold
	2.	Handbook of silicon wafer cleaning technology / edited by Karen A. Reinhardt, Werner Kern by Reinhardt, Karen A Kern, Werner, 1925- Series: Materials science and process technology series Edition: 2nd ed. Publication details: Norwich, New York : William Andrew, 2008 Availability: Items available for loan: PERPUSTAKAAN TUN SERI LANANG (1)Call number: TK7871.85.H366 2008 3. Place hold
	3.	Vacuum deposition onto webs, films, and foils / Charles A. Bishop by Bishop, Charles A Series: Materials science and process technology series Publication details: Norwich, NY : William Andrew Pub., 2007 Online resources: Table of contents only Availability: Items available for loan: PERPUSTAKAAN LINGKUNGAN KEDUA (1)Call number: TS695.B578. Place hold

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