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	1.	Fundamentals of microfabrication : the science of miniaturization / Marc J. Madou by Madou, Marc J Edition: 2nd ed. Publication details: Boca Raton : CRC Press, 2002 Availability: Items available for loan: PERPUSTAKAAN TUN SERI LANANG (2)Call number: TK7836.M329 2002, ... Place hold
	2.	Fundamentals of microfabrication and nanotechnology / Marc J. Madou. by Madou, Marc J [author.] Edition: Third editions. Publisher: Boca Raton, FL : CRC Press, 2012Copyright date: ©2012 Other title: Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology Online resources: Click to ask Cornell University Library to RUSH purchase. We will contact you by email when it arrives (typically within a week). Availability: Items available for loan: PERPUSTAKAAN LINGKUNGAN KEDUA (1)Call number: TK7875.M334 2012 3. Place hold

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