Vacuum Technology [electronic resource] : Practice for Scientific Instruments / by Nagamitsu Yoshimura.
Publication details: Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2008.Description: 354 p. : ill., digital ; 24 cmISBN:- 9783540744337 (electronic bk.)
- 9783540744320 (paper)
- 621.55 22
- TJ940 .Y678 2008
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