Chemical vapour deposition [electronic resource] : an integrated engineering design for advanced materials / by Yongdong Xu, Xiu-Tian Yan.
Series: Engineering materials and processesPublication details: London : Springer-Verlag London, 2010.Description: xiv, 342 p. : ill., digital ; 24 cmISBN:- 9781848828940 (electronic bk.)
- 9781848828933 (paper)
- 671.735 22
- TS695 .Y36 2010
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