Thermal Transport for Applications in Micro/Nanomachining [electronic resource] / by Basil T. Wong, M. Pinar Menguc.
Series: Microtechnology and MEMSPublication details: Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2008.Description: xvii, 231 p. : ill., digital ; 24 cmISBN:- 9783540736073 (electronic bk.)
- 9783540736059 (paper)
- 660.2842 22
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