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Micromechanical Photonics [electronic resource] / by Hiroo Ukita.

By: Contributor(s): Series: Microtechnology and MemsPublication details: Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2006.Description: xi, 250 p. : ill., digital ; 25 cmISBN:
  • 9783540313724 (electronic bk.)
  • 9783540313335 (paper)
Subject(s): DDC classification:
  • 621.36 22
LOC classification:
  • TA1520 .U35 2006
Online resources: In: Springer e-books
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