Reliability of MEMS / edited by Osamu Tabata and Toshiyuki Tsuchiya

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Series: Advanced micro & nanosystems ; v.6Publication details: Weinheim : Wiley-VCH, 2008Description: xx, 303 p. : ill. ; 25 cmISBN:

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Item type	Current library	Home library	Collection	Call number	Materials specified	Copy number	Status	Date due	Barcode
AM	PERPUSTAKAAN LINGKUNGAN KEDUA	PERPUSTAKAAN LINGKUNGAN KEDUA KOLEKSI AM-P. LINGKUNGAN KEDUA	-	TK7875.R458 3 (Browse shelf(Opens below))		1	Available		00001499752

'Testing of materials and devices' -- Cover

Includes bibliographical references and index

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