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Polymers for microelectronics : resists and dielectrics / Larry F. Thompson, C. Grant Willson, Seiichi Tagawa.
Series: ACS symposium series ; 537.Publication details: Washington, D.C. American Chemical Society 1994.Description: 517 p. : ill. ; 24 cmISBN:- 0841227217
| Item type | Current library | Home library | Collection | Call number | Materials specified | Copy number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|---|---|---|
| AM | PERPUSTAKAAN LINGKUNGAN KEDUA | PERPUSTAKAAN LINGKUNGAN KEDUA KOLEKSI AM-P. LINGKUNGAN KEDUA | - | TK7871.15.P6P628 (Browse shelf(Opens below)) | 1 | Available | 00000546512 |
'Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering, Inc., of the American Chemical Society at the 203rd Meeting of the American Chemical Society, San Francisco, Calif., April 5-10, 1992'.
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