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	1.	Microlithography : science and technology / edited by James R. Sheats, Bruce W. Smith by Sheats, James R, 1948- Smith, Bruce W, 1959- Publication details: New York : Marcel Dekker, 1998 Availability: Items available for loan: PERPUSTAKAAN LINGKUNGAN KEDUA (1)Call number: TK7836.M525 3. Place hold
	2.	Microlithography [electronic resource] : science and technology / editors, Kazuaki Suzuki and Bruce W. Smith by Suzuki, Kazuaki Smith, Bruce W, 1959- Series: Optical science and engineering series Edition: 2nd ed. Publication details: Boca Raton : Taylor & Francis, c2007 Online resources: Click here to access online CRCnetBASE Click here for the electronic version Availability: No items available.

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