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Gettering Defects in Semiconductors [electronic resource] / by Victor A. Perevoschikov, Vladimir D. Skoupov.

By: Contributor(s): Series: Springer Series in Advanced Microelectronics ; 19Publication details: Berlin, Heidelberg : Springer Berlin Heidelberg, 2005.Description: xv, 386 p. : ill., digital ; 25 cmISBN:
  • 9783540294993 (electronic bk.)
  • 9783540262442 (paper)
Subject(s): DDC classification:
  • 621.38152 22
LOC classification:
  • QC611.6.D4 P4713 2005
Online resources: In: Springer e-books
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