MEMS vibratory gyroscopes [electronic resource] : structural approaches to improve robustness / by Cenk Acar, Andrei Shkel.
Series: MEMS reference shelfPublication details: Boston, MA : Springer Science+Business Media, LLC, 2009.Description: xii, 256 p. : ill. (some col.), digital ; 24 cmISBN:- 9780387095363 (electronic bk.)
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