Microlithography : science and technology / edited by James R. Sheats, Bruce W. Smith

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Publication details: New York : Marcel Dekker, 1998Description: xii, 780 p. : ill. ; 24 cmISBN:

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Holdings
Item type	Current library	Home library	Collection	Call number	Materials specified	Copy number	Status	Date due	Barcode
AM	PERPUSTAKAAN LINGKUNGAN KEDUA	PERPUSTAKAAN LINGKUNGAN KEDUA KOLEKSI AM-P. LINGKUNGAN KEDUA	-	TK7836.M525 3 (Browse shelf(Opens below))		1	Available		00001361796

Includes bibliographical references and index

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