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Sputtering materials for VLSI and thin film devices / Jaydeep Sarkar.

By: Publisher: Waltham, USA : Elsevier, WA, William Andrew is an imprint of Elsevier, 2014Description: x, 603 pages : illustrations ; 25 cmContent type:
  • text
Media type:
  • unmediated
Carrier type:
  • volume
ISBN:
  • 9780815515937
  • 0815515936
Subject(s): LOC classification:
  • TK7874 .S275 2014
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Includes bibliographical references and index.

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