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	1.	Introduction to microelectromechanical (MEM) microwave systems / Htor J. de los Santos. by Santos, Hector J. de los Series: Artech House microwave library \| Microelectromechanical systems series Publication details: Boston : Artech House, c1999 Other title: Microelectromechanical (MEM) microwave systems Availability: No items available.
	2.	Principles and applications of NanoMEMS physics / edited by Hector De Los Santos. by Santos, Hector J. de los Series: Microsystems (Series) ; v. 15. Publication details: Dordrecht, Netherlands : Springer, 2005 Online resources: Table of contents Availability: Items available for loan: PERPUSTAKAAN TUN SERI LANANG (1)Call number: QC688.P75. Place hold

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