Handbook of cleaning for semiconductor manufacturing : fundamentals and applications / [edited by] Karen A. Reinhardt, Richard F. Reidy.

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Publication details: Salem, Mass. : Scrivener, 2011Description: xxii, 590 p. : ill. ; 26 cmISBN:

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Holdings
Item type	Current library	Home library	Collection	Call number	Materials specified	Copy number	Status	Date due	Barcode
AM	PERPUSTAKAAN LINGKUNGAN KEDUA	PERPUSTAKAAN LINGKUNGAN KEDUA KOLEKSI AM-P. LINGKUNGAN KEDUA	-	QC611.6.S9H366 3 (Browse shelf(Opens below))		1	Available		00002034604

Includes bibliographical references and index.

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