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Dry etching for microelectronics / edited by Ronald A. Powell.
Series: Materials processing theory and practices ; v.4.Publication details: Amsterdam : North-Holland Publishing Company, 1984.Description: 299 p. : ill. ; 24 cmISBN:- 0444869050
| Item type | Current library | Home library | Collection | Call number | Materials specified | Copy number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|---|---|---|
| AM | PERPUSTAKAAN LINGKUNGAN KEDUA | PERPUSTAKAAN LINGKUNGAN KEDUA KOLEKSI AM-P. LINGKUNGAN KEDUA | - | TK7871.85.D79 3 (Browse shelf(Opens below)) | 1 | Available | 00000307341 | |||
| AM | PERPUSTAKAAN TUN SERI LANANG | PERPUSTAKAAN TUN SERI LANANG KOLEKSI AM-P. TUN SERI LANANG (ARAS 5) | - | TK7871.85.D79 (Browse shelf(Opens below)) | 1 | Available | 00000095864 |
Includes bibliographical references and index.
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