Nanoparticle engineering for chemical-mechanical planarization [electronic resource] : fabrication of next-generation nanodevices / authors, Ungyu Paik, Jea-Gun Park

By:

Paik, Ungyu

Contributor(s):

Park, Jea-Gun

Publication details: Boca Raton : Taylor & Francis, 2009ISBN:

9781420059113

Subject(s):

DDC classification:

621.3815/2 22

Online resources:

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Nanoparticle engineering for chemical-mechanical planarization [electronic resource] : fabrication of next-generation nanodevices / authors, Ungyu Paik, Jea-Gun Park

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