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Silicon wet bulk micromachining for MEMS / Prem Pal, Kazuo Sato.
Publisher: Pan Stanford : Singapore , [2017]©2017Description: xii, 424 pages : ilustrations (some color) ; 24 cmContent type:- text
- unmediated
- volume
- 9789814613729
| Item type | Current library | Home library | Collection | Call number | Materials specified | Copy number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|---|---|---|
| AM | PERPUSTAKAAN LINGKUNGAN KEDUA | PERPUSTAKAAN LINGKUNGAN KEDUA KOLEKSI AM-P. LINGKUNGAN KEDUA | - | TK7875.P35 3 (Browse shelf(Opens below)) | 1 | Available | 00002230230 |
Includes bibliogarphical references and index.
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