Plasma electronics : applications in microelectronic device fabrication / T. Makabe, Z. Petrovic

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Series: Series in plasma physicsPublication details: New York : Taylor & Francis, 2006Description: 339 p. : ill. ; 25 cmISBN:

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Holdings
Item type	Current library	Home library	Collection	Call number	Materials specified	Copy number	Status	Date due	Barcode
AM	PERPUSTAKAAN LINGKUNGAN KEDUA	PERPUSTAKAAN LINGKUNGAN KEDUA KOLEKSI AM-P. LINGKUNGAN KEDUA	-	TA2020.M35 3 (Browse shelf(Opens below))		1	Available		00001477550

Includes bibliographical references and index

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