Micromanufacturing and Nanotechnology [electronic resource] / by Nitaigour Premchand Mahalik.
Publication details: Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2006.Description: xxiii, 468 p. : ill., digital ; 25 cmISBN:- 9783540293392 (electronic bk.)
- 9783540253778 (paper)
- 600.07 22
- T147.7 .M54 2006
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