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Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration [electronic resource] / by J. Laconte, D. Flandre, J. -P. Raskin.
Publication details: Boston, MA : Springer, 2006.Description: xiii, 292 p. : ill., digital ; 25 cmISBN:- 9780387288437 (electronic bk.)
- 9780387288420 (paper)
- 621.38152 22
- QC168 .L33 2006
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