Silicon wafer bonding technology for VLSI and MEMS applications / edited by Subramanian S. Iyer and Andre J. Auberton-Herve
Series: EMIS processing series ; no. 11Publication details: London : INSPEC, 2002Description: xxv, 149 p. : ill. 26 cmISBN:- 0852960395
| Item type | Current library | Home library | Collection | Call number | Materials specified | Copy number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|---|---|---|
| AM | PERPUSTAKAAN LINGKUNGAN KEDUA | PERPUSTAKAAN LINGKUNGAN KEDUA KOLEKSI AM-P. LINGKUNGAN KEDUA | - | TK7871.85.S54 (Browse shelf(Opens below)) | 1 | Available | 00001306810 |
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