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Towards Synthesis of Micro-/Nano-systems [electronic resource] : The 11th International Conference on Precision Engineering (ICPE) August 16-18, 2006, Tokyo, Japan / by Fumihiko Kimura, Kenichiro Horio.
Publication details: London : Springer-Verlag London Limited, 2007.Description: xiii, 356 p. : ill., digital ; 31 cmISBN:- 9781846285592 (electronic bk.)
- 9781846285585 (paper)
- Production engineering -- Congresses
- Microtechnology -- Congresses
- Nanotechnology -- Congresses
- Engineering
- Nanotechnology
- Control Engineering
- Industrial and Production Engineering
- Manufacturing, Machines, Tools
- Operating Procedures, Materials Treatment
- Computer-Aided Engineering (CAD, CAE) and Design
- 620.0045 22
- TS176 .I555 2007
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