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Integrated Chemical Microsensor Systems in CMOS Technology [electronic resource] / by Andreas Hierlemann ; edited by H. Baltes, Hiroyuki Fujita, Dorian Liepmann.
Series: Microtechnology and MEMSPublication details: Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2005.Description: ix, 229 p. : ill., digital ; 25 cmISBN:- 9783540273721 (electronic bk.)
- 9783540237822 (paper)
- 621.39732 22
- TK7875 .H54 2005
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