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Wafer level 3-d ics process technology [electronic resource] / edited by Chuan Seng Tan, Ronald J. Gutmann, L. Rafael Reif.

Contributor(s): Series: Series on integrated circuits and systemsPublication details: Boston, MA : Springer-Verlag US, 2008.Description: xiv, 358 p. : ill., digital ; 24 cmISBN:
  • 9780387765341 (electronic bk.)
  • 9780387765327 (paper)
Subject(s): DDC classification:
  • 621.3815 22
LOC classification:
  • TK7874 .W34 2008
Online resources: In: Springer eBooks
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