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Mechanics of Microelectromechanical Systems [electronic resource] / by Nicolae Lobontiu, Ephrahim Garcia.

By: Contributor(s): Publication details: Boston, MA : Springer Science + Business Media, Inc., 2005.Description: xi, 405 p. : ill., digital ; 25 cmISBN:
  • 9780387230375 (electronic bk.)
  • 9781402080135 (paper)
Subject(s): DDC classification:
  • 621 22
LOC classification:
  • TK7875 .L63 2005
Online resources: In: Springer e-books
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