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Shape and Functional Elements of the Bulk Silicon Microtechnique [electronic resource] : A Manual of Wet-Etched Silicon Structures / by Joachim Fruhauf.

By: Contributor(s): Publication details: Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2005.Description: xii, 221 p. : ill., digital ; 24 cmISBN:
  • 9783540268765 (electronic bk.)
  • 9783540221098 (paper)
Subject(s): DDC classification:
  • 620.193 22
LOC classification:
  • QC611.8.S5 F48 2005
Online resources: In: Springer e-books
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