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Precursor Chemistry of Advanced Materials [electronic resource] : CVD, ALD and Nanoparticles / edited by Roland A. Fischer.

Contributor(s): Series: Topics in Organometallic Chemistry ; 9Publication details: Berlin Heidelberg : Springer-Verlag GmbH., 2005Description: xv, 213 p. : ill., digital ; 25 cmISBN:
  • 9783540314516 (electronic bk.)
  • 9783540016052 (paper)
Subject(s): DDC classification:
  • 547.05 22
LOC classification:
  • QD411.7.S94 P74 2005
Online resources: In: Springer e-books
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