Handbook of silicon semiconductor metrology [electronic resource] / edited by Alain C. Diebold

Contributor(s):

Diebold, A. C. (Alain C.)

Publication details: New York : Marcel Dekker, 2001ISBN:

0824705068

Subject(s):

Semiconductors -- Measurement
Semiconductors -- Inspection

DDC classification:

621.3815/2 21

Online resources:

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CRCnetBASE Click here for the electronic version

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Includes bibliographical references and index

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Handbook of silicon semiconductor metrology [electronic resource] / edited by Alain C. Diebold

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