Advanced materials and technologies for micro/nano-devices, sensors and actuators [electronic resource] / edited by Evgeni Gusev, Eric Garfunkel, Arthur Dideikin.
Series: NATO Science for Peace and Security Series B : Physics and BiophysicsPublication details: Dordrecht : Springer Science+Business Media B.V., 2010.Description: 322 p. : ill. (some col.), digital ; 24 cmISBN:- 9789048138074 (electronic bk.)
- 9789048138050 (paper)
- 621.381 22
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